Bulk Micromachined Gyroscope

Fig. 1: SEM view of single cristal silicon gyroscope fabricated with DRIE process.


Fig. 2: Close-up view of DRIE processed gyroscope fingers.


Fig. 3: SEM view of our university logo (DRIE processed).


Fig. 4: Gyroscope Team Members.


Fig. 5: Suspended gyroscope structure using dissolved wafer process. Structural layer is p++ silicon.
(Process not complete).


Fig. 6: 2um-spaced p++ silicon comb fingers using dissolved wafer process.


Fig. 7: Close-up view of 2um-spaced fingers with suspended beams fabricated using dissolved wafer process.


Fig. 8: 4um-spaced comb fingers fabricated using dissolved wafer process.